High field dielectric response in κ-Ga2O3 films

κ-Ga2O3 has been predicted to be a potential ferroelectric material. In this work, undoped Ga2O3 films were grown by either plasma-enhanced atomic layer deposition (PEALD) or metal organic chemical vapor deposition (MOCVD) on platinized sapphire substrates. 50 nm thick PEALD films with a mixture of κ-Ga2O3 and β-Ga2O3 had a relative permittivity of ∼27, a loss tangent below 2%, and high electrical resistivity up to ∼1.5 MV/cm. 700 nm thick MOCVD films with predominantly the κ-Ga2O3 phase had relative permittivities of ∼18 and a loss tangent of 1% at 10 kHz. Neither film showed compelling evidence for ferroelectricity measured at fields up to 1.5 MV/cm, even after hundreds of cycles. Piezoresponse force microscopy measurements on bare κ-Ga2O3 showed a finite piezoelectric response that could not be reoriented for electric fields up to 1.33 MV/cm.

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in [High field dielectric response in κ-Ga2O3 films. Journal of Applied Physics 134, 20 (2023)] and may be found at https://doi.org/10.1063/5.0169420.

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Work Title High field dielectric response in κ-Ga2O3 films
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Open Access
Creators
  1. Fan He
  2. Kunyao Jiang
  3. Yeseul Choi
  4. Benjamin L. Aronson
  5. Smitha Shetty
  6. Jingyu Tang
  7. Bangzhi Liu
  8. Yongtao Liu
  9. Kyle P. Kelley
  10. Gilbert B. Rayner
  11. Robert F. Davis
  12. Lisa M. Porter
  13. Susan Trolier-McKinstry
License In Copyright (Rights Reserved)
Work Type Article
Publisher
  1. Journal of Applied Physics
Publication Date November 22, 2023
Publisher Identifier (DOI)
  1. https://doi.org/10.1063/5.0169420
Deposited May 08, 2024

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  • Created
  • Added 204101_1_5.0169420-1.pdf
  • Added Creator Fan He
  • Added Creator Kunyao Jiang
  • Added Creator Yeseul Choi
  • Added Creator Benjamin L. Aronson
  • Added Creator Smitha Shetty
  • Added Creator Jingyu Tang
  • Added Creator Bangzhi Liu
  • Added Creator Yongtao Liu
  • Added Creator Kyle P. Kelley
  • Added Creator Gilbert B. Rayner
  • Added Creator Robert F. Davis
  • Added Creator Lisa M. Porter
  • Added Creator Susan Trolier-McKinstry
  • Published
  • Updated
  • Updated Work Title Show Changes
    Work Title
    • High field dielectric response in κ-Ga<sub>2</sub>O<sub>3</sub> films
    • High field dielectric response in κ-Ga2O3 films