
2D TMDs (WSe2 and MoS2) synthesized by MOCVD used for complementary one instruction set computer
The WSe2 and MoS2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (MOCVD1). The data includes recipe file from the MOCVD equipment and data files from atomic force microscopy (AFM), room temperature photoluminescence and Raman spectroscopy carried out on the sample. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.
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Work Title | 2D TMDs (WSe2 and MoS2) synthesized by MOCVD used for complementary one instruction set computer |
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Subtitle | Materials Science |
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License | CC BY 4.0 (Attribution) |
Work Type | Dataset |
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Publication Date | April 16, 2024 |
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DOI | doi:10.26207/trxj-sj92 |
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Deposited | April 16, 2025 |
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