2D TMDs (WSe2 and MoS2) synthesized by MOCVD used for complementary one instruction set computer

The WSe2 and MoS2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (MOCVD1). The data includes recipe file from the MOCVD equipment and data files from atomic force microscopy (AFM), room temperature photoluminescence and Raman spectroscopy carried out on the sample. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.

Citation

Chen, Chen; Trainor, Nicholas; Kumari, Shalini (2024). 2D TMDs (WSe2 and MoS2) synthesized by MOCVD used for complementary one instruction set computer [Data set]. Scholarsphere. https://doi.org/10.26207/trxj-sj92

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Work Title 2D TMDs (WSe2 and MoS2) synthesized by MOCVD used for complementary one instruction set computer
Subtitle Materials Science
Access
Open Access
Creators
  1. Chen Chen
  2. Nicholas Trainor
  3. Shalini Kumari
Keyword
  1. Materials Science
  2. 2D TMDs
  3. MoS2
  4. WSe2
  5. MOCVD
  6. epitaxial growth
  7. c-plane sapphire
License CC BY 4.0 (Attribution)
Work Type Dataset
Acknowledgments
  1. NSF Cooperative Agreement DMR-2039351
Publisher
  1. 2D Crystal Consortium
Publication Date April 16, 2024
Subject
  1. Materials Science
DOI doi:10.26207/trxj-sj92
Related URLs
Deposited April 16, 2025

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Version 1
published

  • Created
  • Updated
  • Updated Keyword, Subject, Publisher, and 4 more Show Changes
    Keyword
    • Materials Science, 2D TMDs, MoS2, WSe2, MOCVD, epitaxial growth, c-plane sapphire
    Subject
    • Materials Science
    Publisher
    • 2D Crystal Consortium
    Related URLs
    • https://data.2dccmip.org/jCKpcN8EK27q, https://doi.org/10.60551/znh3-mj13, https://doi.org/10.60551/fdhr-6s19, https://doi.org/10.60551/0w4q-5h15, https://doi.org/10.60551/a534-xs21
    Subtitle
    • Materials Science
    Description
    • The WSe2 and MoS2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (MOCVD1). The data includes recipe file from the MOCVD equipment and data files from atomic force microscopy (AFM), room temperature photoluminescence and Raman spectroscopy carried out on the sample. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.
    Publication Date
    • 2024-04-16
  • Updated Acknowledgments Show Changes
    Acknowledgments
    • NSF Cooperative Agreement DMR-2039351
  • Added Creator Chen Chen
  • Added Creator Nicholas Trainor
  • Added Creator Shalini Kumari
  • Added Readme.txt
  • Added MCV1-240628B-CC.zip
  • Added MCV1-230515A-CC.zip
  • Updated License Show Changes
    License
    • https://creativecommons.org/licenses/by/4.0/
  • Published
  • Updated