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Thin film growth of 3R-b’-In2Se3 on Al2O3 and Si(111) substrates by molecular beam epitaxy

This work describes the growth of b-In2Se3 via molecular beam epitaxy along with characterization of its properties. The thin film morphology, crystal structure and phase maps of b-In2Se3 on Si(111) and Al2O3(0001) were evaluated by atomic force microscopy, x-ray diffraction, and Raman spectroscopy as a function of atomic Se/In flux ratio and growth temperature. Scanning transmission electron microscopy (STEM) confirms the 3R polytype of b-In2Se3 in films on both substrates with minor disorder associated with the 2H polytype at the interface. Indications of in-plane Se atom displacements characteristic of the 3R-b’-In2Se3 polytype were found by STEM, and second harmonic generation analysis in films on Al2O3(0001), but not in films on Si(111). Electrical transport measurements demonstrated locally varying anisotropic responses with the applied electric fields along different in-plane directions with some hysteresis associated with trapping of charges.

Citation

Liu, Derrick Shao Heng; Hilse, Maria; Fazlioglu-Yalcin, Benazir (2025). Thin film growth of 3R-b’-In2Se3 on Al2O3 and Si(111) substrates by molecular beam epitaxy [Data set]. Scholarsphere. https://doi.org/10.26207/3q8j-q830

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Metadata

Work Title Thin film growth of 3R-b’-In2Se3 on Al2O3 and Si(111) substrates by molecular beam epitaxy
Subtitle Materials Science
Access
Open Access
Creators
  1. Derrick Shao Heng Liu
  2. Maria Hilse
  3. Benazir Fazlioglu-Yalcin
Keyword
  1. MBE
  2. In2Se3
  3. Growth Window Mapping
  4. Polytypism
  5. Ferroelectricity
  6. Structural Properties
License CC BY 4.0 (Attribution)
Work Type Dataset
Acknowledgments
  1. NSF Cooperative Agreement DMR-2039351
Publisher
  1. 2D Crystal Consortium
Publication Date May 30, 2025
Subject
  1. Materials Science
DOI doi:10.26207/3q8j-q830
Related URLs
  1. https://data.2dccmip.org/Ulk2TOlEWw7s
  2. https://doi.org/10.60551/gqq8-yj90
  3. https://doi.org/10.60551/fdhr-6s19
  4. https://doi.org/10.60551/0w4q-5h15
  5. https://doi.org/10.60551/y05r-h460
  6. https://doi.org/10.60551/nbqw-ad98
  7. https://doi.org/10.60551/ves9-yg76
Deposited May 30, 2025

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Version 1
published

  • Created

    May 30, 2025 16:21 by rkh24

  • Updated

    May 30, 2025 16:21 by [unknown user]

  • Updated Keyword, Subject, Publisher, and 4 more Show Changes

    May 30, 2025 16:24 by rkh24

    Keyword
    • MBE, In2Se3, Growth Window Mapping, Polytypism, Ferroelectricity, Structural Properties
    Subject
    • Materials Science
    Publisher
    • 2D Crystal Consortium
    Related URLs
    • https://data.2dccmip.org/Ulk2TOlEWw7s, https://doi.org/10.60551/gqq8-yj90, https://doi.org/10.60551/fdhr-6s19, https://doi.org/10.60551/0w4q-5h15, https://doi.org/10.60551/y05r-h460, https://doi.org/10.60551/nbqw-ad98, https://doi.org/10.60551/ves9-yg76
    Subtitle
    • Materials Science
    Description
    • This work describes the growth of b-In2Se3 via molecular beam epitaxy along with characterization of its properties. The thin film morphology, crystal structure and phase maps of b-In2Se3 on Si(111) and Al2O3(0001) were evaluated by atomic force microscopy, x-ray diffraction, and Raman spectroscopy as a function of atomic Se/In flux ratio and growth temperature. Scanning transmission electron microscopy (STEM) confirms the 3R polytype of b-In2Se3 in films on both substrates with minor disorder associated with the 2H polytype at the interface. Indications of in-plane Se atom displacements characteristic of the 3R-b’-In2Se3 polytype were found by STEM, and second harmonic generation analysis in films on Al2O3(0001), but not in films on Si(111). Electrical transport measurements demonstrated locally varying anisotropic responses with the applied electric fields along different in-plane directions with some hysteresis associated with trapping of charges.
    Publication Date
    • 2025-05-30
  • Updated Acknowledgments Show Changes

    May 30, 2025 16:27 by rkh24

    Acknowledgments
    • NSF Cooperative Agreement DMR-2039351
  • Added Creator Derrick Liu

    May 30, 2025 16:27 by rkh24

  • Added Creator Maria Hilse

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  • Added Creator Benazir Fazlioglu Yazin

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  • Updated License Show Changes

    May 30, 2025 16:38 by rkh24

    License
    • https://creativecommons.org/licenses/by/4.0/
  • Deleted Creator Derrick Liu

    May 30, 2025 22:18 by rkh24

  • Deleted Creator Benazir Fazlioglu Yazin

    May 30, 2025 22:18 by rkh24

  • Added Creator Derrick Shao Heng Liu

    May 30, 2025 22:18 by rkh24

  • Added Creator Benazir Fazlioglu-Yalcin

    May 30, 2025 22:18 by rkh24

  • Added Readme.txt

    May 30, 2025 22:23 by rkh24

  • Published

    May 30, 2025 22:23 by rkh24

  • Updated

    May 31, 2025 22:05 by [unknown user]