WSe2 on c-plane sapphire with preferred orientation grown by MOCVD

Joan Redwing; Haoyue Zhu; Tanushree Choudhury; Thomas Mc Knight; Nicholas Trainor; Benjamin Huet

WSe2 on c-plane sapphire with preferred orientation grown by MOCVD

This data package includes information on sample preparation, growth conditions and characterization results for WSe2 samples reported in the main body of the manuscript entitled “Step engineering for nucleation and domain orientation control in WSe2 epitaxy on c-plane sapphire” by H. Zhu, et al. The WSe2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (systems MOCVD1 and MOCVD2). The data includes recipe files from the MOCVD equipment and data files from atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM) and room temperature photoluminescence and Raman spectroscopy carried out on the samples. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.

All samples grown as part of this study are included in the data package. The sample numbers associated with figures in the main manuscript are as follows:

Figure 1 MCV1-200316A-HZ, MCV1-200814A-HZ, MCV1-200813A-HZ, MCV1-200313A-HZ, MCV1-200312A-HZ Figure 2 MCV2-200914A-TM, 2009004A-TM Figure 3 MCV1-200311A-HZ, MCV1-200310A-HZ Figure 4 MCV2-210723A-KY, MCV1-211005A-TM Figure 5 MCV1-200311A-HZ, MCV1-200316A-HZ, MCV1-200309A-HZ Figure 6 MCV1-200722A-HZ

Additional details are provided in the 2DCC LiST database: http://data.2dccmip.org/10.26207/f7b1-fs46

Joan Redwing jmr31@psu.edu 5/25/23

Citation

Redwing, Joan; Zhu, Haoyue ; Choudhury, Tanushree ; Mc Knight, Thomas; Trainor, Nicholas; Huet, Benjamin (2023). WSe2 on c-plane sapphire with preferred orientation grown by MOCVD [Data set]. Scholarsphere. https://doi.org/10.26207/f7b1-fs46

Files

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Metadata

Work Title	WSe2 on c-plane sapphire with preferred orientation grown by MOCVD
Subtitle	Materials Science
Access	Open Access
Creators	Joan Redwing Haoyue Zhu Tanushree Choudhury Thomas Mc Knight Nicholas Trainor Benjamin Huet
Keyword	MOCVD WSe2 Sapphire
License	CC BY 4.0 (Attribution)
Work Type	Dataset
Acknowledgments	NSF Cooperative Agreement DMR-2039351
Publisher	2D Crystal Consortium
Publication Date	May 25, 2023
Subject	Materials Science
DOI	doi:10.26207/f7b1-fs46
Related URLs	http://data.2dccmip.org/10.26207/f7b1-fs46
Deposited	May 26, 2023

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Work History

Version 1
published

Created

May 26, 2023 12:53 by rkh24
Updated

May 26, 2023 12:53 by [unknown user]
Updated Acknowledgments Show Changes

May 26, 2023 12:56 by rkh24
Acknowledgments
- NSF Cooperative Agreement DMR-2039351
Added Creator Joan Redwing

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Added Creator Haoyue Zhu

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Added Creator Tanushree Choudhury

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Added Creator Thomas Mc Knight

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Added Creator Nicholas Trainor

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Added Creator Benjamin Huet

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Added MCV1-191211B-HZ.zip

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Added MCV1-191212C-HZ.zip

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Added MCV1-200304A-HZ.zip

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Added MCV1-200309A-HZ.zip

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Added MCV1-200310A-HZ.zip

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Added MCV1-200317B-HZ.zip

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Added MCV1-200716A-HZ.zip

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Added MCV1-200717A-HZ.zip

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Added MCV1-200720A-HZ.zip

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Added MCV1-200722B-HZ.zip

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Added MCV1-200723B-HZ.zip

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Added MCV1-200812A-HZ.zip

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Added MCV1-200829A-HZ.zip

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Added MCV2-200904A-TM.zip

May 26, 2023 13:40 by rkh24
Added MCV2-200914A-TM.zip

May 26, 2023 13:40 by rkh24
Added MCV2-210623A-KY.zip

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Added MCV2-210715A-KY.zip

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Added MCV2-210715B-KY.zip

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Added MCV2-210716A-KY.zip

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Added MCV2-210722A-KY.zip

May 26, 2023 13:40 by rkh24
Added MCV2-210722B-KY.zip

May 26, 2023 13:40 by rkh24
Added MCV2-211005A-TM.zip

May 26, 2023 13:40 by rkh24
Updated License Show Changes

May 26, 2023 13:41 by rkh24
License
- https://creativecommons.org/licenses/by/4.0/
Published

May 26, 2023 13:41 by rkh24
Updated

April 04, 2024 10:22 by [unknown user]

Version 2
published

Created

May 26, 2023 13:45 by rkh24
Updated Description, Related URLs Show Changes

May 26, 2023 13:46 by rkh24
Description
- This data package includes information on sample preparation, growth conditions and characterization results for WSe2 samples reported in the main body of the manuscript entitled “Step engineering for nucleation and domain orientation control in WSe2 epitaxy on c-plane sapphire” by H. Zhu, et al. The WSe2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (systems MOCVD1 and MOCVD2). The data includes recipe files from the MOCVD equipment and data files from atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM) and room temperature photoluminescence and Raman spectroscopy carried out on the samples. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.
- All samples grown as part of this study are included in the data package. The sample numbers associated with figures in the main manuscript are as follows:
- Figure 1 MCV1-200316A-HZ, MCV1-200814A-HZ, MCV1-200813A-HZ, MCV1-200313A-HZ, MCV1-200312A-HZ
- Figure 2 MCV2-200914A-TM, 2009004A-TM
- Figure 3 MCV1-200311A-HZ, MCV1-200310A-HZ
- Figure 4 MCV2-210723A-KY, MCV1-211005A-TM
- Figure 5 MCV1-200311A-HZ, MCV1-200316A-HZ, MCV1-200309A-HZ
- Figure 6 MCV1-200722A-HZ
- Additional details are provided in the 2DCC LiST database: ADD LiST URL HERE
- Additional details are provided in the 2DCC LiST database: https://m4-2dcc.vmhost.psu.edu/list/data/10.26207/f7b1-fs46
- Joan Redwing jmr31@psu.edu 5/25/23
Related URLs
- https://m4-2dcc.vmhost.psu.edu/list/data/10.26207/f7b1-fs46
Published

May 26, 2023 13:47 by rkh24
Updated

April 04, 2024 10:22 by [unknown user]

Version 3
published

Created

May 26, 2023 13:47 by rkh24
Updated Description Show Changes

May 26, 2023 13:48 by rkh24
Description
- This data package includes information on sample preparation, growth conditions and characterization results for WSe2 samples reported in the main body of the manuscript entitled “Step engineering for nucleation and domain orientation control in WSe2 epitaxy on c-plane sapphire” by H. Zhu, et al. The WSe2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (systems MOCVD1 and MOCVD2). The data includes recipe files from the MOCVD equipment and data files from atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM) and room temperature photoluminescence and Raman spectroscopy carried out on the samples. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.
- All samples grown as part of this study are included in the data package. The sample numbers associated with figures in the main manuscript are as follows:
- Figure 1 MCV1-200316A-HZ, MCV1-200814A-HZ, MCV1-200813A-HZ, MCV1-200313A-HZ, MCV1-200312A-HZ
- Figure 2 MCV2-200914A-TM, 2009004A-TM
- Figure 3 MCV1-200311A-HZ, MCV1-200310A-HZ
- Figure 4 MCV2-210723A-KY, MCV1-211005A-TM
- Figure 5 MCV1-200311A-HZ, MCV1-200316A-HZ, MCV1-200309A-HZ
- Figure 6 MCV1-200722A-HZ
- Additional details are provided in the 2DCC LiST database: https://m4-2dcc.vmhost.psu.edu/list/data/10.26207/f7b1-fs46
- Joan Redwing jmr31@psu.edu 5/25/23
Published

May 26, 2023 13:48 by rkh24
Updated

April 04, 2024 10:22 by [unknown user]

Version 4
published

Created

June 09, 2023 11:36 by rkh24
Updated Related URLs Show Changes

January 05, 2024 23:18 by rkh24
Related URLs
- ~~https://m4-2dcc.vmhost.psu.edu/list/data/10.26207/f7b1-fs46~~
- http://data.2dccmip.org/10.26207/f7b1-fs46
Published

January 05, 2024 23:18 by rkh24
Updated

April 04, 2024 10:22 by [unknown user]

Version 5
published

Created

January 05, 2024 23:18 by rkh24
Updated Description Show Changes

January 05, 2024 23:18 by rkh24
Description
- This data package includes information on sample preparation, growth conditions and characterization results for WSe2 samples reported in the main body of the manuscript entitled “Step engineering for nucleation and domain orientation control in WSe2 epitaxy on c-plane sapphire” by H. Zhu, et al. The WSe2 samples were grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (systems MOCVD1 and MOCVD2). The data includes recipe files from the MOCVD equipment and data files from atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM) and room temperature photoluminescence and Raman spectroscopy carried out on the samples. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified.
- All samples grown as part of this study are included in the data package. The sample numbers associated with figures in the main manuscript are as follows:
- Figure 1 MCV1-200316A-HZ, MCV1-200814A-HZ, MCV1-200813A-HZ, MCV1-200313A-HZ, MCV1-200312A-HZ
- Figure 2 MCV2-200914A-TM, 2009004A-TM
- Figure 3 MCV1-200311A-HZ, MCV1-200310A-HZ
- Figure 4 MCV2-210723A-KY, MCV1-211005A-TM
- Figure 5 MCV1-200311A-HZ, MCV1-200316A-HZ, MCV1-200309A-HZ
- Figure 6 MCV1-200722A-HZ
- ~~Additional details are provided in the 2DCC LiST database: https://m4-2dcc.vmhost.psu.edu/list/data/10.26207/f7b1-fs46~~
- Additional details are provided in the 2DCC LiST database: http://data.2dccmip.org/10.26207/f7b1-fs46
- Joan Redwing jmr31@psu.edu 5/25/23
Published

January 05, 2024 23:18 by rkh24
Updated

April 04, 2024 10:22 by [unknown user]

WSe2 on c-plane sapphire with preferred orientation grown by MOCVD

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