Ferroelectricity in boron-substituted aluminum nitride thin films

This manuscript demonstrates ferroelectricity in B-substituted AlN thin films and a complementary set of first-principles calculations to understand their structure-property relationships. Al1-xBxN films are grown by dual-cathode reactive magnetron sputtering on (110)W/(001)Al2O3 substrates at 300°C at compositions spanning x=0 to x=0.20. X-ray diffraction studies indicate a decrease in both the c and a lattice parameters with increasing B concentration, resulting in a decrease in unit cell volume and a constant c/a axial ratio of 1.60 over this composition range. Films with 0.02≤x≤0.15 display ferroelectric switching with remanent polarizations exceeding 125μCcm-2 while maintaining band gap energies of >5.2eV. The large band gap allows low frequency hysteresis measurement (200 Hz) with modest leakage contributions. At B concentrations of x>0.15, c-axis orientation deteriorates and ferroelectric behavior is degraded. Density-functional theory calculations corroborate the structural observations and provide predictions for the wurtzite u parameter, polarization reversal magnitudes, and composition-dependent coercive fields.

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Work Title Ferroelectricity in boron-substituted aluminum nitride thin films
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Open Access
Creators
  1. John Hayden
  2. Mohammad Delower Hossain
  3. Yihuang Xiong
  4. Kevin Ferri
  5. Wanlin Zhu
  6. Mario Vincenzo Imperatore
  7. Noel Giebink
  8. Susan Trolier-Mckinstry
  9. Ismaila Dabo
  10. Jon Paul Maria
License In Copyright (Rights Reserved)
Work Type Article
Publisher
  1. Physical Review Materials
Publication Date April 1, 2021
Publisher Identifier (DOI)
  1. https://doi.org/10.1103/PhysRevMaterials.5.044412
Deposited December 08, 2021

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  • Created
  • Added Ferroelectricity_in_Boron-substituted_Aluminum_Nitride_Thin_Films-PhyRevMat-2021.pdf
  • Added Creator John Hayden
  • Added Creator Mohammad Delower Hossain
  • Added Creator Yihuang Xiong
  • Added Creator Kevin Ferri
  • Added Creator Wanlin Zhu
  • Added Creator Mario Vincenzo Imperatore
  • Added Creator Noel Giebink
  • Added Creator Susan Trolier-Mckinstry
  • Added Creator Ismaila Dabo
  • Added Creator Jon Paul Maria
  • Published
  • Updated
  • Updated